Design and Fabrication of Mems U-Shaped Cantilever

MEMS are used in acceleration, flow, pressure and force sensing applications on the micro macro levels. The fundamental part of every sensor is transducer which converts measurend intrest into interpretable output signal. most prominent piezoresistive cantilever translates any signal an electrical signal.This paper presents deisgn fabrication U shaped with enhanced sensitivity stiffness gives better results than other cantilevers. simulation cantilevers designed using COMSOL software. technology becomes more affordable easier to fabricate increasing quantities. Each layer process quite complex final fabricated product will tested for high end applications.